X射线光电子能谱
混乱
模棱两可
曲线拟合
仪表(计算机编程)
可靠性(半导体)
材料科学
分析化学(期刊)
计算物理学
计算机科学
化学
X射线
光电发射光谱学
谱线
物理
核磁共振
心理学
机器学习
功率(物理)
色谱法
天文
操作系统
程序设计语言
量子力学
精神分析
作者
George H. Major,Neal Fairley,Peter M. A. Sherwood,Matthew R. Linford,Jeff Terry,Vincent Fernandez,Kateryna Artyushkova
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2020-10-06
卷期号:38 (6): 061203-061203
被引量:113
摘要
The use of peak fitting to extract information from x-ray photoelectron spectroscopy (XPS) data is of growing use and importance. Due to increased instrument accessibility and reliability, the use of XPS instrumentation has significantly increased around the world. However, the increased use has not been matched by the expertise of the new users, and the erroneous application of curve fitting has contributed to ambiguity and confusion in parts of the literature. This guide discusses the physics and chemistry involved in generating XPS spectra, describes good practices for peak fitting, and provides examples of appropriate use along with tools for avoiding mistakes.
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