Research progress of chlorine-free synthetic silica glass

Silica glass has many excellent properties such as high spectral transmittance and radiation resistance, and is widely used in semiconductors, lasers, optical instruments and other fields. The high performance synthetic silica glass prepared by SiCl4 has the problem of pollution of tail gas and waste water in the process of production, while chlorine-free organic silicon used in the preparation of synthetic silica glass can effectively solve the problem of environmental pollution. In this review, combined with the recent studies on the synthesis of silica glass using octamethylcyclotetrasiloxane(OMCTS, D4) as raw materials, this review mainly review the purification of octamethylcyclotetrasiloxane and the preparation technology of synthetic silica glass, as well as the characteristics of the internal reaction mechanism, and the related technologies, the prospect of synthetic silica glass technology is forecasted.