Effects of Thickness and Calcination Temperature on Tin Dioxide Sol‐Derived Thin‐Film Sensor

The grain size of in the thin films prepared from sol solution decreased with decreasing film thickness when calcined at elevated temperature (800°C). Because of this notable phenomenon, the resistivity and sensitivity of the films showed rather complex dependence on film thickness and calcination temperature. These characteristics could be reduced into either of two simple functions of, depending on whether the calcination temperature was lower (400°C, 600°C) or higher (800°C).