氮化物
材料科学
铝
冶金
纳米技术
工艺工程
工程类
图层（电子）
作者
А. А. Елагин,А. Р. Бекетов,М. В. Баранов,Р. А. Шишкин
标识
DOI：10.1007/s11148-013-9546-2
摘要
Russian and overseas sources published in the last twenty years for aluminum nitride preparation methods are studied. Both basic and relatively simple technology, as well as atypical innovative procedures, are analyzed, making it possible to form a complete picture of aluminum nitride preparation methods within the world.
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