Infrared optical properties of silicon monoxide films

The dielectric function ε ≡ ε1 + iε2 of evaporated SiO films is reported for the wavelength region from 8 to 33 μm. The data are based on spectrophotometric measurements of reflectance and transmittance for films evaporated onto KRS-5 and crystalline Si and on reflectance measurements on films evaporated onto opaque Al layers. The consistency in the results for ε and ε2 is verified by the Kramers-Kronig analysis.