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Nanoindentation hardness, texture and microstructure of α-Al2O3 and κ-Al2O3 coatings

纳米压痕 微观结构 材料科学 纹理(宇宙学) 硬质合金 扫描电子显微镜 透射电子显微镜 碳化物 相(物质) 复合材料 涂层 冶金 化学 纳米技术 有机化学 人工智能 图像(数学) 计算机科学
作者
S. Ruppi,Anders Larsson,Axel Flink
出处
期刊:Thin Solid Films [Elsevier]
卷期号:516 (18): 5959-5966 被引量:78
标识
DOI:10.1016/j.tsf.2007.10.078
摘要

Nanoidentation responses of Al2O3 coatings obtained using chemical vapour deposition on cemented carbides were studied and related to the Al2O3 modification and microstructure. Five different Al2O3 layers were studied: (i) κ-Al2O3, (ii) α-Al2O3, obtained through the κ → α phase transformation, (iii) as-grown α-Al2O3 with (101¯2) texture, (iv) as-grown α-Al2O3 with (101¯4) texture and (v) as-grown α-Al2O3 with (0001) texture. All the Al2O3 coatings were deposited to a thickness of at least 6 μm onto identical WC – 6 wt.% Co cemented carbide substrates. Nanoindentation was performed on taper-section specimens. The microstructure, phase and texture were elucidated by using transmission electron microscopy, scanning electron microscopy and X-ray diffraction. Nanoindentation responses of the as-grown, textured α-Al2O3 coatings were compared with κ-Al2O3 and α-Al2O3 formed as a result of the κ → α phase transformation. The as-grown, textured α-Al2O3 layers exhibited clearly a higher hardness and Young's modulus than the κ-Al2O3 and the α-Al2O3 layers formed as a result of the phase transformation. Only slight differences in hardness and modulus could be detected between the (101¯2), (101¯4) and (0001) textured α-Al2O3 films. Among these the (101¯2) textured α-Al2O3 coating exhibited the lowest hardness and modulus. Opposite to earlier reports, the present investigation clearly showed that κ-Al2O3 exhibited both the lowest hardness and Young's modulus as compared with the other studied coatings. It is emphasised that the earlier nanoindentation investigations that were intended to deal with α-Al2O3 were in fact performed on transformed κ-Al2O3.
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