数码产品
电力电子
功率(物理)
电气工程
计算机科学
工程类
物理
电压
量子力学
出处
期刊:Science
[American Association for the Advancement of Science (AAAS)]
日期:2016-02-11
卷期号:351 (6274): 676-678
标识
DOI:10.1126/science.351.6274.676-m
摘要
Materials Science
A challenge for flexible electronics is to couple devices with power sources that are also flexible. Ideally, they could also be processed in a way that is compatible with current microfabrication technologies. Huang et al. deposited a relatively thick layer of TiC on top of an oxide-coated Si film. After chlorination, most, but importantly not all, of the TiC was converted into a porous carbon film that could be turned into an electrochemical capacitor. The carbon films were highly flexible, and the residual TiC acted as a stress buffer with the underlying Si film. The films could be separated from the Si to form free-floating films, with the TiC providing a support layer.
Science , this issue p. [691][1]
[1]: /lookup/doi/10.1126/science.aad3345
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