Electromagnetic Characteristics of High Pressure Microwave Plasma Generator Based on a Cylindrical Resonant Cavity

To investigate the electromagnetic properties of microwave plasma generator intuitively,quantitatively,and conveniently,we presented a novel high pressure microwave plasma generator based on a cylindrical resonant cavity,and simulated and analyzed the cavity of specified dimension and its coupling devices using the software HFSS.For the microwave resonator under TM010 mode,characteristic parameters,such as quality factor,resonant frequency,reflection loss,port impedance,and maximum electric field strength,were calculated.Meanwhile,the impedance matching and the electric field distribution were studied.In addition,a practical generator was tested under 5 atm,and simulation results of electric field intensity were compared with the experimental results.The experimental results imply that the proposed microwave plasma generator is feasible: under high pressure,it can excite microwave plasma with a microwave peak power lower than 1 kW within a certain range of frequency.