共形矩阵
材料科学
标度系数
灵敏度(控制系统)
应变计
大气温度范围
快速傅里叶变换
热敏电阻器
分析化学(期刊)
光电子学
纳米技术
电子工程
电气工程
计算机科学
复合材料
制作
算法
物理
化学
工程类
热力学
病理
医学
替代医学
色谱法
作者
Feiyi Liao,Chang Lü,Guang Yao,Zhuocheng Yan,Min Gao,Taisong Pan,Yin Zhang,Xue Feng,Yuan Lin
出处
期刊:IEEE Electron Device Letters
[Institute of Electrical and Electronics Engineers]
日期:2017-08-01
卷期号:38 (8): 1128-1131
被引量:24
标识
DOI:10.1109/led.2017.2714260
摘要
Flexible temperature and mechanical sensing capabilities are of great importance in the artificial intelligence. Here, we report a skin conformable, high sensitive temperature-mechanical dual-parameter sensor based on a PET/vanadium dioxide (VO 2 )/PDMS multilayer structure fabricated using the transfer printing technique. The ultrahigh mechanical sensitivity to strains in the range of 0%-0.1% with a gauge factor over 400 was attributed to the disconnection-reconnection process of the ziplike nanoscale cracks under strain or vibration. And the enhanced temperature sensing performance with a resolution of 0.1 K was attributed to the high temperature coefficient of resistance of VO 2 material. The temperature and the mechanical signals simultaneously recorded in the electrical resistance signal were separated via fast Fourier transform (FFT) and inverse FFT. The flexibility and ultra-sensitivity to temperature and vibration make the sensor a promising application in advanced artificial intelligence.
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