P‐80: A Study about the Metal Corrosion and Diffusion Phenomenon in Cu‐Mo Dual Layer Metal Wires for TFT‐LCDs

Due to the low resistance and excellent glass adhesion, Cu/Mo dual‐layer metal wire has been widely used in TFT‐LCD industry. However, the galvanic reaction between the two metals, which may be the main cause of metal corrosion and diffusion in some failure TFT devices, has been seldom reported. According to the detailed study of the wet and rinse process, this work proposes a possible corrosion mechanism.