Synthesis pathways to thin films of stable layered nitrides

One of the grand challenges of materials chemistry is the selective synthesis of metastable materials away from equilibrium. Thin film deposition methods with rapid condensation of vapor precursors can readily synthesize metastable phases, but they often struggle to yield the thermodynamic ground state. How can thermodynamically-stable structures for practical applications be grown using kinetically-limited synthesis methods? Here, we reveal a synthesis pathway to thermodynamically-stable ordered layered ternary nitride materials, and we explain why disordered metastable intermediate phases tend to form in the first place. We show that starting from atomically dispersed vapor precursors leads to a 3D long-range disordered MgMoN2 thin film polymorph product, with a layered short-range order that has a low-energy transformation barrier to the layered 2D-like stable structure. We extend this synthesis approach to ScTaN2, MgWN2 and MgTa2N3, opening a door to synthesis of other layered nitride thin films with unique semiconducting and quantum properties.