An Add-in Test Structure Chip to Unitedly Assess PVD Material Properties in University Open Nanotechnology Platform

Open nanotechnology platforms at universities and research institutes are becoming essential for agile and rapid microelectronic device research and development. To further extend its capability with more users, process data acquisition and digital transformation is of high priority. In order to uniformly acquire process data in an open platform, where users' process charts are all different, we propose a "chamber sharing system", in which a small test chip designed for easily measuring necessary parameters is loaded in the process chamber together with user's sample, which will be submitted to the platform. As the first realization of such a test chip, we designed and fabricated an 8×8 mm ² chip for physical vapor deposition, enabling the film's thickness, stress, and conductivity measurement. With easy preparation requiring no cleanroom environment, results compatible with previously reported values were obtained.