Raman Spectroscopy, Fourier Transform Infrared Spectroscopy (FTIR) and X-Ray Photoelectron Spectroscopy (XPS)

This chapter presents the principles and applications of Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR) and x-ray photoelectron spectroscopy (XPS) techniques. These methods are other important varieties of using incident photons to study electronic and vibrational properties of materials, in addition to photoluminescence, described in Chap. 2 . The discussion in this chapter covers the scientific and technical issues while several experimental examples highlight the significance and applications of each characterization technique in the fields of microelectronics engineering and material science.