Ultra-precision grinding and polishing of fused quartz material

In aerospace and high power laser devices, fused quartz material is in large demand because of its strong adaptability.The fused quartz optical mirror blank was processed by ultra-precision grinding, magnetorheological machining (MRF) and small smooth polishing (SP).Ultra-precision grinding machine was used for rough pre-polishing to obtain high precision surface shape, and then MRF was used for ultra-precision polishing to further improve the surface shape.The medium and high frequency errors generated by MRF processing were controlled by using smooth polishing.The experiments of ultra-precision machining of fused quartz mirror were carried out by using the combined process, and the rapid convergence of deterministic machining and full frequency error was realized.The combined process can not only improve the processing efficiency of optical mirror, but also reduce the processing cost and realize short process processing.