High-Resolution Detection of Microwave Fields on Chip Surfaces Based on Scanning Microwave Microscopy

With the development of microwave chips toward high integration, new challenges have been posed to high-precision microwave field test techniques. In this article, we propose a chip surface microwave field characterization method and design a corresponding microwave power measurement system based on a scanning probe imaging system and microwave test technology. The minimum detected microwave power of the system is better than 1 nW by experimental verification. The proposed method can be applied to image the distribution of the microwave field of the chip and it is helpful to optimize chip design and performance in the future.