Mixed Germania‐Silica Films on Ru(0001): A Combined Experimental and Theoretical Study

Abstract Two‐dimensional oxide films are potentially useful for future technological applications, but also important objects to study model catalyst systems on the more fundamental side. Here we study silica, germania, and mixed silica‐germania films supported on a metal single crystal surface Ru(0001). Those mixed films are interesting objects to systematically modify the properties of silica films, which may be used as membranes or covers for model studies in confined space, due to the modification of the rather stiff silica layers by incorporating germanium atoms replacing silicon atoms. Here we report a combined experimental and theoretical study of such layers, where we show how X‐ray photoelectron spectroscopy in combination with LEED and I/V LEEM measurements allow us to judge the formation of such mixed films.