Fabrication and Electrochemical Characteristics of All-Solid-State Lithium-Ion Batteries Using V[sub 2]O[sub 5] Thin Films for Both Electrodes

An all‐solid‐state lithium‐ion cell consisting of two types of vanadium oxide electrodes and a lithium phosphorous oxynitride electrolyte has been developed. A thin‐film type rechargeable battery was fabricated by a radio‐frequency (rf) magnetron sputtering under gas from a target and under gas from a target. The cell had a typical open‐circuit voltage of and a discharge capacity of about at a current density of when discharged down to . The battery also exhibited relatively good cycling and self‐discharge performances, typically above 350 cycles and (roughly equivalent to a capacity percentage of 2.3%, and a self‐discharge current of ) at steady state, respectively. Because the cell contained only two kinds of inorganic materials prepared by rf magnetron sputtering, a simple, compact and heat‐durable dry cell with good reliability was realized in a completely solid‐state and thin‐film configuration. ©1999 The Electrochemical Society