Large-scale SU-8 Micro-Pole-Arrays decorated with hierarchical Metal-Dielectric-Metal nanostructures as sensitive 3D SERS substrates

Dielectric layer-mediated surface-enhanced Raman scattering (SERS) substrates are currently explored for ultrasensitive detection and expected to provide uniform SERS response by the virtue of three-dimensional micro-nanostructures, dielectric layer, and plasmonic metal nanostructures. For this purpose, the present work reports on the development of the metal-dielectric-metal (MDM) three-dimensional (3D) micro-pole-arrays structure based on SU-8 colloid lithography. By utilizing the large-scale periodic arrangement characteristics of SU-8 colloidal lithography, along with the hot spot effect created by the nano-gap between MDM, we successfully prepared an array of SERS substrates that exhibit both periodicity and multi-dimensional plasmonic coupling effect. Compared to a single metal nanoparticle substrate, the SERS activity of the substrate is significantly enhanced, and the substrate has trace detection ability (LOD of detection of 10−12 mol/L for R6G). The enhancement factor (EF) is 5.72 × 107. Periodicity ensures that the prepared substrate has good reproducibility (RSD < 8 %) and stability. Furthermore, the substrate modified with HS-β-CD demonstrated potential for rapid trace SERS detection of polychlorinated biphenyls (PCB-77) (LOD of 10−8 mol/L for PCB-77). The results indicate that the proposed substrate has the potential for application in the preparation of SERS sensors with high sensitivity and uniformity.