干涉测量
稳健性(进化)
光学
计算机科学
激光器
涡流
物理
生物化学
热力学
基因
化学
作者
Guoyong Ye,Tao Yuan,Yalin Zhang,Tong Wang,Xiaodong Zhang
标识
DOI:10.1016/j.optlaseng.2023.107871
摘要
Laser interferometry is favored for its non-contact, high-resolution, and dynamic range capabilities. Vortex beams can enhance accuracy and robustness with their degrees of freedom and spiral phase information without the need for excessive modifications to the interferometric optical path. Consequently, laser interferometry based on vortex beams (LIVB) has become one of the most effective optimization strategies. This paper reviews its research status, including measurement principles, methods, and signal processing techniques for linear displacement, rotation, and surface parameters. Furthermore, the review presents a comparative analysis of several representative measurement systems. Finally, it provides prospects for the development of LIVB, highlighting its high accuracy and robustness, as well as the trend of integrating multiple technologies.
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