The material deformation modes of monocrystalline gallium antimonide (GaSb) under nano-scratching

The deformation characteristics of GaSb are investigated by employing nano-scratch tests to understand the material removal mechanism during ultra-precision grinding. The nano-scratches are obtained by a cube-corner tip under the two linear normal load conditions (0–30 mN and 0–60 mN). The normal force/scratch distance-penetration depth curves and the characteristics of chips and cracks are analyzed to understand the transition mechanism of ductile to brittle removal. In addition, the maximum principal stress near the bottom of the scratch is calculated to analyze the deformation behavior. The results revealed that the deformation behavior of three zones of deformation is plastic deformation, the transition from plastic to brittle deformation, and brittle deformation, respectively. The change rate of stress is significant differences in the zone of brittle-ductile transition. The critical ratio between mean contact pressures and hardness in the transition region is determined as 0.39 and 0.21, respectively.