材料科学
碳化硅
晶体生长
化学气相沉积
Crystal(编程语言)
纳米技术
工程物理
结晶学
计算机科学
复合材料
化学
工程类
程序设计语言
作者
Minh‐Tan Ha,Seong‐Min Jeong
标识
DOI:10.1007/s43207-022-00188-y
摘要
Silicon carbide (SiC) is a wide-bandgap semiconductor material that is viable for the next generation of high-performance and high-power electrical devices. In general, bulk SiC single crystals have been grown at very high temperatures in a closed reactor; hence, the growth process is difficult to monitor using in situ techniques. Consequently, computational simulations have been utilized to understand, validate, and design crystal growth processes. In this review, we summarize the results of computational simulations of SiC bulk crystal growth using three primary methods: physical vapor transport, high-temperature chemical vapor deposition, and top-seeded solution growth. The simulations reveal the effects of physicochemical phenomena, such as temperature distribution, fluid flow, and chemical reactions, on crystal growth behaviors. Process parameters for high-quality and high-yield crystal growth have been realized with the aid of simulations. Furthermore, recent advances in machine learning techniques for accelerating the design of crystal growth parameters and enabling real-time parameter optimization are introduced. Overall, computational simulations are a crucial tool for the development of SiC bulk crystal growth and its applications.
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