Finite Element Analysis for Design Optimization of MEMS Double Ended Tuning Fork Resonator

A resonator design is very crucial for a resonant sensor since it affects the sensitivity, linearity, operational range, and resolution of the sensor. In this study, a DETF resonator is the object of analysis, to obtain a proper selection of boundary conditions and suitable structure for vibrational model. In order to achieve high Q values, proper vibrational mode selection is an important criterion for the operation of DETF resonator. This mode selection depends on the dimensional parameters, such as length, width, thickness, and gap of the tines of the DETF resonator. This paper presents a numerical approach-based analysis for obtaining optimum geometric configuration of a DETF resonator. The impact of DETF geometry on modal resonant frequency and mode separation is elaborated with the help of simulations using COMSOL Multiphysics tool.