Fabrication and properties of MEMS compatible energetic arrays based on carbon-based copper azide

Copper azide is a promising primary explosive with low toxicity and high energy density. However, due to the extreme electrostatic sensitivity, it does not have many practical applications in the miniaturized pyrotechnics. In this work, we constructed an energetic composite, embedding in oriented carbon nanotubes (CNTs) arrays grown on a silicon substrate, which is compatible with the microfabrication technique of Micro-Electro-Mechanical Systems (MEMS). Since it has excellent electrical conductivity and mechanical strength, oriented CNTs, as nano-containers of Cu(N3)2, can availably reduce the electrostatic sensitivity and bring about the directional output of detonation energy. The oriented CNTs arrays were prepared by magnetron sputtering, anodization and chemical vapor deposition successively. Electrochemical deposition was used to deposit copper nanoparticles in the cavities of CNTs, which were converted into copper azide by subsequent in-situ azide reaction. The electrostatic sensitivity test, thermal performance analysis and laser ignition experiment were conducted on the energetic composite, respectively. The results show that the energetic composite kept safe under an electrostatic stimulation of 3.18 mJ, while original copper azide exploded when subjected to stimulation of 0.05 mJ. The energetic composite opens a new route of introducing hazardous primary explosives into micro-initiators and modern pyrotechnics.