计量学
金刚石车削
机械加工
光学
云纹
平版印刷术
干涉测量
计算机科学
采样(信号处理)
材料科学
物理
探测器
冶金
作者
Vinod Mishra,Nitin Dubey,Mahendra Singh,Raj Kumar,Subrat Kar,SUNIL JHA,Luke Mayer,Daewook Kim,Gufran Khan
出处
期刊:Optics Letters
[The Optical Society]
日期:2023-03-30
卷期号:48 (7): 1934-1934
摘要
The manufacturing and characterization of freeform optical surfaces are influenced by their high sensitivity to misalignments. In this work, the computational sampling moiré technique combined with phase extraction is developed for the precise alignment of freeform optics during fabrication and in metrology applications. This novel, to the best of our knowledge, technique achieves near-interferometry-level precision in a simple and compact configuration. This robust technology can be applied to industrial manufacturing platforms (such as diamond turning machines, lithography, and other micro-nano-machining techniques) as well as their metrology equipment. In a demonstration of computational data processing and precision alignment using this method, iterative manufacturing of freeform optical surfaces with a final-form accuracy of about 180 nm was accomplished.
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