Optimization of rear surface morphology in n-type TOPCon c-Si solar cells

Tunnel oxide passivated contact (TOPCon) crystalline silicon (c-Si) solar cells have attracted much attention because of their superior electrical properties such as the lower contact resistivity and better interface passivation at high temperatures. However, the TOPCon c-Si solar cells also have room for further improvement in optical performance, and the embodiment of optical advantages needs to be matched synchronously in electrical aspect. Here, the rear silicon pyramids with different angles have been achieved through solution corrosion to maximize the light absorption in the c-Si substrate. The light absorption for the pyramid angle of less than 30° is better. Compared with the cell samples with rear pyramid for a certain angle, the samples with flat back surface possess better surface passivation, and the contact resistivity can be reduced effectively by increasing the phosphorus doping concentration and adjusting the annealing temperature. Furthermore, the TOPCon c-Si solar cells with flat rear surface covered by 70 nm poly-Si have been demonstrated to increase the conversion efficiency by about 0.15 % vs. the counterpart for poly-Si of 130 nm thickness, and the improvement is mainly due to the increase of JSC and FF by 0.07 mA/cm2 and 0.72 %, respectively.