Investigation of the nanocrystalline nature of silicon carbide (3C–SiC) nanoparticles by XRD and TEM methods

FE-SEM and TEM images were used to identify the size of 3C–SiC nanoparticles. Simultaneously, HRTEM and Selected Area Electron Diffraction (SAED) analyses were conducted in order to determine the crystalline nature of the nanoparticles. Moreover, lattice parameters of 3C–SiC nanoparticles have been studied by SAED and XRD analyses. The possible existence of other modified polytypes of silicon carbide was investigated in the experimental sample. The 2[Formula: see text] angles were determined according to the lattice parameters. Lattice constants and lattice angles for nanocrystalline 3C–SiC particles were defined from the experiments.