摘要
Integrated circuits (ICs) refer to circuits that can be fabricated on single crystalline substrates to perform specific functions of logic, analog, memory, RF, and power. IC technology and industry have been progressed for 60 years. IC applications have gradually expanded from the initial military field to all aspects (e.g., industrial, agricultural, transportation, government, finance, security, communications, education, media, and entertainment). The first-generation semiconductor materials are mainly germanium (Ge) and silicon (Si). The second-generation semiconductor materials are mainly gallium arsenide (GaAs), indium phosphide (InP), indium antimonide (InSb), and cadmium sulfide (CdS). The third-generation semiconductor materials typically have a wide forbidden bandwidth (greater than 2.2 eV), such as silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO), and aluminum nitride (AlN). The manufacturing of ICs in a broad sense mainly includes design, fabrication, and packaging (with testing).