衍射
极化(电化学)
波长
物理
光学
极紫外光刻
紫外线
数值孔径
镜头(地质)
极端紫外线
焦距
材料科学
光电子学
化学
激光器
物理化学
作者
Tao Wang,Weijie Kong,Changtao Wang,Ling Liu,Mingbo Pu,Xiaoliang Ma,Xiong Li,Yun‐Ze Long,Xiangang Luo
摘要
In recent years, the super-oscillatory lens based on optical super-oscillatory phenomenon has been successfully applied to sub-diffraction focusing and imaging. However, most of the previously reported super-oscillatory lens only work in the visible and near-infrared wavelengths, and little research has been done in the ultraviolet. In this paper, a polarization-insensitive ultraviolet super-oscillatory metalens doublet is proposed. The simulation results show that sub-diffraction focusing and imaging with different incidence angles can be achieved at the ultraviolet operating wavelength of 365nm, and the full width at half maximum of the sub-diffraction foci is approximately 0.7 times of the diffraction limit. This metalens doublet has a numerical aperture of 0.4472, a focal length of 0.6896 mm, and a field of view of ±25°. The proposed polarization-insensitive ultraviolet super-oscillatory metalens doublet can be used in the fields of ultraviolet lithography and microscopic imaging.
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