All‐inorganic flexible high‐temperature strain sensor based on SrRuO3/muscovite heteroepitaxy

Abstract Design and fabrication of flexible strain sensors are still challenging for high‐temperature application in the aerospace, metallurgical industry, and underground energy exploration. In the present work, an all‐inorganic flexible strain sensor has been fabricated based on single‐crystal SrRuO 3 (SRO) thin films epitaxially grown on muscovite. A high resistive tunability ((∆ R / R 0 %) ∼ 26.05%), excellent linearity (correlation coefficient of 0.93), and large gauge factor (GF ∼ 101) have been achieved in the as‐prepared SRO‐based sensors with great bending durability. The mechanism for the tunability of the electrical transport in flexible SRO thin films under mechanical bending is proposed based on the Raman and X‐ray photoelectron spectroscopy results. The sensors have been confirmed to work properly from ambient temperatures up to ∼425 K, showing the potential application in high‐temperature environments. Moreover, the flexible sensors have the ability to monitor the hand joint movements.