Electromechanically Tunable Frequency‐agile Metamaterial Bandpass Filters for Terahertz Waves

Abstract Tunable terahertz (THz) transmission filters are essential for various key applications including miniaturized spectrometers, hyperspectral imagers, and channel selectors in high‐speed wireless communication systems. However, tunable THz transmission filters have remained elusive, so far. Here, an electromechanically reconfigurable microcantilevers integrated complementary metamaterial to function as a frequency‐agile THz bandpass transmission filter is reported. A large tunable range of 70% at central frequency of 0.455 THz is designed, and the experimental results show active switching of THz transmission frequency range of 54% at central frequency of 0.5 THz. The proposed electromechanically reconfigurable metadevice provides a large tunable range, uses electrical control, and is fabricated using complementary metal oxide semiconductor (CMOS) compatible materials and processes, thus making it highly attractive for the realization of plethora of miniaturized high‐performance THz components and devices.