Linearity Characterization of a Dual–Parallel Silicon Mach–Zehnder Modulator

We report a high-linearity wideband dual–parallel silicon Mach–Zehnder modulator (MZM). This modulator consists of two carrier-depletion-based MZMs with a single-drive push–pull traveling wave electrode configuration. An analytic model is established to investigate the linearity property of the modulator. The measurement results show the modulator can effectively suppress third-order harmonics and third-order intermodulation distortions, with improved modulation linearity, compared to a single MZM.