Properties of tantalum oxide thin film for solid electrolyte

Tantalum oxide thin films were prepared by RF ion-plating and RF sputtering. Protonic conductivities of the films varied from 10−5 to 10−10 S/cm with the condition of deposition. The high ionic conductive film has low packing density and shows strong O-H absorption. It was concluded that the adsorbed water gives much influence to the protonic conduction.