材料科学
折射率
薄膜
摩尔吸收率
带隙
分析化学(期刊)
椭圆偏振法
退火(玻璃)
衰减系数
色散(光学)
光学
光电子学
复合材料
纳米技术
化学
物理
色谱法
作者
Yan Jiang,Xin‐Gui Tang,Q.X. Liu,Q. Li,Aili Ding
标识
DOI:10.1016/j.mseb.2006.11.025
摘要
Pb(Zr0.53Ti0.47)O3 (PZT) thin films grown on Pt-coated Si substrates were prepared by a sol–gel process. Crystalline structure characterisation and optical constants (refractive index n, extinction coefficient k) and bandgaps Eg of PZT thin films annealed at 550, 600 and 650 °C were obtained by X-ray diffraction (XRD) and spectroscopic ellipsometry (SE) in the UV–vis and near-infrared range of 235–1700 nm. A four-phase fitting model was employed to describe the optical properties of the PZT thin films; the spectra of their optical constants and the bandgap energy Eg were determined by means of optimisation. The refractive index n, absorption coefficient α and bandgaps Eg of crystalline PZT thin films on Pt-coated Si substrates annealed at 550–650 °C are lager than that of pure PbZrO3 and PbTiO3 thin films. In addition, the refractive index dispersion data related to the structure of the films agreed well with Cauchy dispersion relationship. The dependencies of the refractive index, the extinction coefficient and the optical bandgap energy on annealing temperature were analysed.
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