Thermal laser separation and high-throughput layer deposition for edge passivation for TOPCon shingle solar cells

This work demonstrates the reduction of cutting-induced losses on tunnel-oxide passivated contact (TOPCon) shingle solar cells via edge passivation using high-throughput layer deposition. TOPCon shingle solar cells with a size of 26.46 mm × 158.75 mm are separated from industrial full-square TOPCon host cells either by laser scribing and mechanical cleaving (LSMC) from the emitter-free rear side or by thermal laser separation (TLS) from the front side. TLS yields up to 0.2%abs more efficient shingle cells directly after singulation in comparison to shingle cells that have been separated by LSMC. Passivated edge technology (PET) is applied by depositing aluminum oxide (Al2O3) layers using two different tools: thermal atomic layer deposition (T-ALD) in a lab-scale tool with a throughput of tens of shingle cells per hour and a high-throughput plasma-enhanced ALD (PE-ALD) prototype tool with a throughput of about 60,000 shingle cells per hour. The energy conversion efficiency of the edge-passivated shingle cells after T-ALD Al2O3 PET is found to be 0.4%abs higher than directly after separation. This gain is the same regardless of whether LSMC or TLS is used for cell separation. For PE-ALD Al2O3 and TLS, a gain of 0.5%abs is measured after PET. Stringing tests with electrically conductive adhesive so far indicate that Al2O3 layers do not negatively affect the resistance of cell to cell interconnections. Thus, low-damage cell cutting in combination with high-throughput Al2O3 layer deposition for edge passivation is a very promising approach to maintain high efficiency for industrial TOPCon solar cells in shingled modules.