Atomic layer deposition of PbCl2, PbBr2 and mixed lead halide (Cl, Br, I) PbXnY2−n thin films

We describe six new atomic layer deposition processes for PbCl 2 and PbBr 2 . Two processes deliver high quality uniform and conformal PbCl 2 and PbBr 2 thin films fit for semiconductor devices.