原子物理学
电子回旋共振
等离子体
电子
回旋加速器
电磁电子波
离子回旋共振
激发
回旋加速器共振
电场
化学
物理
核物理学
量子力学
作者
Quan‐Zhi Zhang,Jiarui Liu,Yong-Xin Liu,Wenqi Lu,Jing‐Yu Sun,You‐Nian Wang
标识
DOI:10.1088/1361-6595/ac7903
摘要
Abstract An enhanced electron heating mechanism based on a resonance between the cyclotron motion of electrons and radio frequency (rf) electric field in the plasma bulk is reported in weakly magnetized capacitively coupled argon plasmas at low pressure. When the electron cyclotron frequency coincides with the applied power source frequency, the bulk electrons can continuously acquire energy from the background electric field within certain rf periods during the cyclotron motion, inducing overall distinct increase of excitation rate and electron temperature in the plasma bulk. This enhanced electron heating effect has been examined by a combination of kinetic particle simulations, experimental measurements, and an analytical model, and the dynamics of electrons are revealed at resonant conditions.
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