材料科学
聚二甲基硅氧烷
制作
硅酮
电极
弹性体
电介质
电容感应
光电子学
复合材料
传感器
激光烧蚀
纳米技术
激光器
电气工程
光学
医学
化学
替代医学
物理化学
病理
工程类
物理
作者
Oluwaseun A. Araromi,Samuel Rosset,Herbert Shea
标识
DOI:10.1109/transducers.2015.7181323
摘要
We report a novel method for the fabrication of polydimethylsiloxane (PDMS)-carbon composite electrodes for silicone dielectric elastomer transducers. The methodology combines patterning by laser ablation and oxygen plasma induced bonding, producing stretchable and flexible devices with exceptional electrode adhesion and high mechanical robustness. The methodology also offers great flexibility in the size and scale of electrode designs; we demonstrate this in the fabrication of flexible bending actuators > 10 cm long and interdigitated capacitive sensors with micro-scale features.
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