材料科学
泄漏(经济)
外延
电场
电子
硅
光电子学
俘获
基质(水族馆)
图层(电子)
纳米技术
物理
宏观经济学
经济
地质学
海洋学
生物
量子力学
生态学
作者
Chunyan Song,Xuelin Yang,Peng Ji,Jun Tang,Anqi Hu,Yuxia Feng,Wei Lin,Weikun Ge,Zhijian Yang,Fujun Xu,Bo Shen
标识
DOI:10.1016/j.spmi.2019.01.028
摘要
The impact of electron injection on vertical leakage current of GaN-on-Si epitaxial layers with an AlN interlayer has been investigated. At high electric field, the AlN interlayer as an energy barrier can suppress the injection of electrons from the silicon substrate into the top buffer layers, and eventually a vertical leakage was reduced by two orders of magnitude at 600 V. At low electric field, the holes flow via dislocations, and prevent the formation of a negative depletion region at the top GaN layer increasing the leakage. The correlation between the vertical leakage and the buffer-related trapping has also been clarified by ramped back-gating characterizations.
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