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Effect of workpiece curvature on the tool influence function during hemispherical sub-aperture tool glass polishing

材料科学 抛光 曲率 光学 半径 流离失所(心理学) 曲率半径 复合材料 机械 几何学 数学 心理学 物理 流量平均曲率 计算机科学 心理治疗师 平均曲率 计算机安全
作者
Tayyab Suratwala,J. Menapace,Gary Tham,R. Steele,Lana L. Wong,Nathan J. Ray,Brian Bauman,Michael K. Gregory,Thomas Hordin
出处
期刊:Applied Optics [Optica Publishing Group]
卷期号:60 (4): 1041-1041 被引量:7
标识
DOI:10.1364/ao.415376
摘要

The influence of workpiece curvature on the tool influence function spot during polishing of fused silica glass with cerium oxide slurry, while using a rotating hemispherical pad-foam tool for a wide variety of process conditions (tool displacement, inclination angle, and rotation rate), has been investigated. (Workpiece curvature ranged from 500 mm radius concave to 43 mm radius convex.) The TIF spot decreases in diameter and increases in the peak removal rate on more convex workpieces. In contrast, the TIF spot increases both in diameter and peak removal rate on more concave workpieces. For the range of workpiece curvatures investigated, both the spot size and the peak removal rate changed significantly, as much as 2 times. An elastic sphere–sphere contact mechanics model, which utilizes both a modified displacement (that leads to a change in the applied load) as well as a mismatch factor (that influences the pressure distribution shape), has been developed. The model was validated using both offline load-displacement measurements and finite-element analysis simulations. The model quantitatively describes the measured change in the relative contact diameter and relative pressure distribution, as well as semiquantitively describes the change in the relative volumetric removal rate on a large variety of TIF spots. The change in the volumetric removal rate for convex workpieces is a result of the balance between a decreasing spot size (reducing removal) and an increasing peak pressure (increasing removal), which usually results in relatively small changes in volumetric removal. In the case of concave workpieces, the volumetric removal rate change is also governed by a similar balance, but the spot size increase contribution dominates, resulting in a significant increase in volumetric removal rate. Understanding these trends can enable methods to add greater determinism during the fabrication of freeform optics by adjusting polishing parameters (such as dwell time) while the tool translates along a workpiece surface with different local curvatures.
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