An improved capacitance pressure sensor with a novel electrode design

电容 电极 压力传感器 材料科学 光电子学 电气工程 声学 电子工程 工程类 机械工程 物理 量子力学
作者
V. Sravani,Santhosh Krishnan Venkata
出处
期刊:Sensors and Actuators A-physical [Elsevier]
卷期号:332: 113112-113112 被引量:3
标识
DOI:10.1016/j.sna.2021.113112
摘要

• Design of novel capacitance pressure sensor is proposed in this work. • Concentric type circular electrodes are designed for pressure measurement. • Improved sensitivity and linearity is achieved in comparison to existing diaphragm type sensor. • Neural network based calibration is reported. Pressure sensors are one of the most widely used sensors in many process loops. It is said that around two-thirds of the process loop contains at least a pressure sensor, thus making it very important to have a pressure sensor with higher accuracy, sensitivity, etc. The capacitance type pressure sensor is one of the variants of pressure sensors based on the principle of change in capacitance for change in input pressure. The objective of the proposed work is to design a novel pressure sensor with improved sensitivity and accuracy as compared to a conventional diaphragm-based capacitance pressure sensor. The shape and pattern of electrodes used in the capacitance pressure sensor are varied without affecting the overall dimensions. The obtained capacitance is converted to voltage with the help of a signal conditioning circuit, which is further linearized using regression algorithms. From the results obtained it is seen that the proposed sensor has an improvement in sensitivity by a factor of 79 over the conventional diaphragm pressure sensor of similar dimension and composition. The proposed method on implementation in real-life resulted in a root mean square percentage error of 0.46%.
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