Chao Ma,Dong Xu,Wenfeng Liu,Tianyu Dong,Shengtao Li
出处
期刊:IEEE Electron Device Letters [Institute of Electrical and Electronics Engineers] 日期:2021-08-30卷期号:42 (10): 1536-1539被引量:13
标识
DOI:10.1109/led.2021.3109035
摘要
Flexible microscopic pressure sensors are important to the emerging fields of intelligent robots and advanced healthcare. However, common microstructured pressure sensors often require sophisticated mould and/or material preparation, and yield limited pressure sensing performances. In this letter, we report a facile approach to design a scalable and stretchable mould-free sensitive layer with a unique hierarchical microstructure. Inspired by natural skin, a sensitive layer with interdigitated electrodes is utilized to constructed into resistive pressure sensors, which are able to robustly detect the pressure variations with high sensitivity in a wide dynamic range (about $33\,\,kPa^{-1}$ below 5 kPa, more than $0.6\,\,kPa^{-1}$ under 108 kPa), also deliver low hysteresis (within 8%), rapid response (less than 48 ms), and ultralow operation voltage ( $10~{\mu }V$ ). We illustrate that such self-patterned high-performance pressure sensors can be applied to convert the pressure stimulus into spike-like signals in both low- and medium-pressure regimes, and are being able to clearly reveal the details of human pulse wave.