Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm

Considering the random fluctuations of the layer thickness, a method of robust design of broadband EUV multilayers based on multi-objective evolutionary algorithm is presented. Owing to the optimization of multi-objective evolutionary algorithm, the optical performance and robust quality of broadband Mo/Si multilayer can be optimized simultaneously, and then a set of robust designs of aperiodic EUV multilayers, which are insensitive to the thickness errors can be obtained in one single simulation run. The robust designs of broadband Mo/Si multilayers could be used to reduce the production risks of EUV mirrors, and this research demonstrates a great potential of application of multi-objective evolutionary algorithm on the design of optical thin film.