Morphology and Mechanical Properties of TiN Coatings Prepared with Different PVD Methods

TiN coatings were prepared on the GCr15 substrate by the cathode arc deposition, medium frequency magnetron sputtering and their composite methods. The coatings were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) spectroscopy, microscratch test, friction and wear test. Moreover, the effects of different preparation methods on the structure and mechanical properties of the coatings were compared. The results show that the coating prepared by the composite method of arc and magnetron possesses a smooth surface and better comprehensive properties such as high cohesion and hardness; thus the wear rate is lower