硅
基质(水族馆)
材料科学
空格(标点符号)
曲面(拓扑)
光电子学
几何学
计算机科学
数学
地质学
海洋学
操作系统
作者
Tsutomu Sato,Naofumi Aoki,Ichiro Mizushima,Y. Tsunashima
标识
DOI:10.1109/iedm.1999.824206
摘要
A new technique to form empty spaces in silicon substrates is presented. The empty space with various shapes, such as plate as well as sphere and pipe, could be formed under the surface of the silicon substrate.
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