飞秒
平版印刷术
材料科学
光子学
激光器
光学
光学材料
纳米技术
无光罩微影
光子
双光子激发显微术
制作
领域(数学)
光刻
3D打印
光电子学
电子束光刻
物理
抵抗
医学
替代医学
数学
图层(电子)
病理
复合材料
纯数学
荧光
作者
Diana Gonzalez‐Hernandez,Simonas Varapnickas,Andrea Bertoncini,Carlo Liberale,Mangirdas Malinauskas
标识
DOI:10.1002/adom.202201701
摘要
Abstract The field of 3D micro‐optics is rapidly expanding, and essential advances in femtosecond laser direct‐write 3D multi‐photon lithography (MPL, also known as two‐photon or multi‐photon polymerization) are being made. Micro‐optics realized via MPL emerged a decade ago and the field has exploded during the last five years. Impressive findings have revealed its potential for beam shaping, advanced imaging, optical sensing, integrated photonic circuits, and much more. This is supported by a game‐changing and increasing industrial interest from key established companies in this field. In this review, the origin and the advancement of micro‐optics fabrication with MPL are detailed by describing the chronology, distinguishing discrete application groups, providing generalized technical data on the processes and available materials, and discussing the foreseen near‐future advances.
科研通智能强力驱动
Strongly Powered by AbleSci AI