Beam-shaped femtosecond laser printing of quasi-capsule-shaped holographic terahertz metasurfaces

Terahertz (THz) metasurfaces have opened up a new avenue for the THz wavefront modulation. However, high-efficient and low-cost fabrication of THz metasurfaces remains a great challenge today. Here, quasi-capsule-shaped polarization-multiplexed holographic THz metasurfaces were printed by a beam-shaped femtosecond laser. The laser beam was spatially modulated by holograms of optimized cylindrical lens loaded on a spatial light modulator (SLM). The size of quasi-capsule apertures can be exquisitely and flexibly controlled by adjusting the focal length in holograms, pulse energy, and pulse number. Based on near-field diffraction and Burch encoding, an array of 100 × 100 basic unit apertures were initially designed, and a polarization-multiplexed THz metasurface was finally printed with a dimension of 8 mm × 8 mm. The function of polarization multiplexing was demonstrated, by which two kinds of images were reconstructed in response to X and Y-polarization THz waves, respectively. The present work highlights a great leap in fabrication method for THz metasurfaces and hopefully stimulates the development of miniaturized and integrated THz systems.