薄膜晶体管
材料科学
活动层
光电子学
X射线反射率
无定形固体
阈值电压
图层(电子)
氧化物薄膜晶体管
晶体管
表面粗糙度
溅射
薄膜
电压
纳米技术
复合材料
电气工程
结晶学
化学
工程类
作者
Jia‐Ling Wu,Hung‐Jung Lin,Bo-Yuan Su,Yu‐Cheng Chen,Sheng−Yuan Chu,Ssu-Yin Liu,C. C. Chang,Chun‐Guey Wu
标识
DOI:10.1016/j.ceramint.2013.08.015
摘要
In this research, bottom-gate thin film transistors (TFTs) of amorphous indium gallium zinc oxide (α-IGZO)-based active layers were grown by the radio-frequency sputtering technique. The device characteristics of two kinds of TFT structures, namely α-IGZO/GZO double active layer TFT and α-IGZO single active layer TFT, were compared. To explain the differences in the TFT performances of these different structures, X-ray reflectivity (XRR) and contact angles of the active layer were measured. The α-IGZO/GZO double active layer TFT exhibits superior device performance as compared to the other TFT structure because of its highest thin film density (5.87 g/cm3), lowest surface roughness (1.89 nm), and largest surface energy (60.07 mJ/m2). Also, the mechanisms of this double active layer to improve the device characteristics were systematically investigated. The improved saturation mobility, sub-threshold voltage, on/off current ratio, and trap density of the α-IGZO/GZO double active layer TFT were 18.92 cm2 V−1 S−1, 0.33 V/decade, 1.33×108, and 4.25×1012 eV−1 cm−2, respectively, indicating the potential of this structure to be applied on large-area-flat-panel displays.
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