薄膜晶体管
阈下斜率
阈值电压
材料科学
功勋
电介质
晶体管
等效氧化层厚度
光电子学
氧化物
氧化物薄膜晶体管
电子迁移率
氧化铟锡
凝聚态物理
图层(电子)
电压
电气工程
纳米技术
栅氧化层
物理
冶金
工程类
作者
Oli Lowna Baroi,S. M. Ishraqul Huq,Shourin Rahman Aura,Taniza Marium,Md. Shaikh Abrar Kabir,P. Laxminarayana
标识
DOI:10.1142/s0217984923502615
摘要
This paper presents a performance analysis of indium-gallium-zinc-oxide (IGZO)- and pentacene-based top-gate-top-contact (TGTC) and bottom-gate-top-contact (BGTC) thin film transistors (TFTs). Extensive simulation has been performed to assess the performances in terms of threshold voltage, subthreshold slope, on-off current ratio, mobility, and figure of merit (FoM). Results indicate a trade-off between mobility and current ratio with respect to the permittivity of the dielectric layer, where tantalum oxide (Ta 2 O[Formula: see text] provides the optimum result in terms of FoM. The mobility of IGZO is significantly higher for both structures, whereas the current ratio for IGZO is higher than pentacene in the BGTC configuration. Comparing the structural configurations, Ta 2 O 5 -IGZO-based BGTC achieves [Formula: see text] and [Formula: see text] better mobility and current ratio, respectively, over TGTC structures. The threshold voltage of IGZO-based TFT is observed to increase with the permittivity of the dielectric in TGTC configuration but decrease in BGTC configuration. Meanwhile, the increase in oxide and active layer thicknesses causes a decrease in the threshold voltage. Moreover, both mobility and current ratio improve with a decrease in oxide or active layer thickness. Maximum mobility of 32.30[Formula: see text]cm 2 /Vs and a maximum current ratio of 7.54E+08 are achieved for Ta 2 O 5 -IGZO-based BGTC TFT with 10[Formula: see text][Formula: see text]m channel thickness and 5[Formula: see text][Formula: see text]m oxide thickness.
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