X-Rays Diffraction Study of InGaN/GaN Heterostructures Grown by MOCVD Technique at Different Temperatures

Indium gallium nitride / gallium nitride (InGaN/GaN) heterostructures were grown by using metal organic vapor deposition technique with four different growth temperatures (740 °C, 760 °C, 780 °C, and 800 °C). The structural properties and crystalline quality were investigated using high resolution X-ray diffraction (HRXRD) technique. XRD ω-2θ scan mode at GaN (002) diffraction plane was performed to assess the film’s quality. Through the simulation fitting, the indium composition and the thickness of the thin films were obtained. From the observation, an increase in the growth temperature resulted in higher intensity and smaller full-width at half maximum value of the InGaN (002) diffraction peak, which indicated improvement to the crystalline quality of the InGaN/GaN heterostructure. Moreover, the indium composition of the InGaN epilayer was found to decrease with an increase of the growth temperature due to the thermal decomposition of In-N bond and its re-evaporation from the growing surfaces.