MOCVD growth of β-Ga2O3 with fast growth rates (>4.3 μm/h), low controllable doping, and superior transport properties

Si-doped β-phase (010) Ga2O3 epi-films with fast growth rates were comprehensively investigated using trimethylgallium (TMGa) as the Ga precursor via metalorganic chemical vapor deposition (MOCVD). Two main challenges facing the MOCVD growth of thick (010) β-Ga2O3 films with fast growth rates include high impurity carbon (C) incorporation and rough surface morphologies due to the formation of imbedded 3D pyramid-shaped structures. In this work, two different categories of oxygen source (high-purity O2 > 99.9999% and O2* with 10 ppm of [H2O]) were used for β-Ga2O3 MOCVD growth. Our study revealed that the size and density of the 3D defects in the β-Ga2O3 epi-films were significantly reduced when the O2* was used. In addition, the use of off-axis (010) Ga2O3 substrates with 2° off-cut angle leads to further reduction of defect formation in β-Ga2O3 with fast growth rates. To suppress C incorporation in MOCVD β-Ga2O3 grown with high TMGa flow rates, our findings indicate that high O2 (or O2*) flow rates are essential. Superior room temperature electron mobilities as high as 110–190 cm2/V·s were achieved for β-Ga2O3 grown using O2* (2000 sccm) with a growth rate of 4.5 μm/h (film thickness of 6.3 μm) within the doping range of 1.3 × 1018–7 × 1015 cm−3. The C incorporation is significantly suppressed from ∼1018 cm−3 to <5 × 1016 cm−3 ([C] detection limit) for β-Ga2O3 grown using high O2 (O2*) flow rate of 2000 sccm. Results from this work will provide guidance on developing high-quality, thick β-Ga2O3 films required for high power electronic devices with vertical configurations.